"Programmable thermal processing module for semiconductor substrates."

Khalid El-Awady, Charles D. Schaper, Thomas Kailath (2004)

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DOI: 10.1109/TCST.2004.824775

access: closed

type: Journal Article

metadata version: 2020-06-08

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Khalid El-Awady, Charles D. Schaper, Thomas Kailath:
Programmable thermal processing module for semiconductor substrates. IEEE Trans. Control. Syst. Technol. 12(4): 493-509 (2004)

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