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"Scanning Laser Lithography With Constrained Quadratic Exposure Optimization."

Andrew J. Fleming et al. (2019)

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DOI: 10.1109/TCST.2018.2836910

access: closed

type: Journal Article

metadata version: 2021-04-09

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  - https://dblp.org/rec/journals/tcst/FlemingGRW19
Andrew J. Fleming, Omid T. Ghalehbeygi, Ben S. Routley, Adrian G. Wills:
Scanning Laser Lithography With Constrained Quadratic Exposure Optimization. IEEE Trans. Control. Syst. Technol. 27(5): 2221-2228 (2019)

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