"Nonlinear Generalized Predictive Control of the Crystal Diameter in CZ-Si ..."

Ding Liu et al. (2020)

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DOI: 10.1109/TCST.2019.2898975

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type: Journal Article

metadata version: 2025-01-19

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Ding Liu, Ni Zhang, Lei Jiang, Xiao-Guo Zhao, Wei-Feng Duan:
Nonlinear Generalized Predictive Control of the Crystal Diameter in CZ-Si Crystal Growth Process Based on Stacked Sparse Autoencoder. IEEE Trans. Control. Syst. Technol. 28(3): 1132-1139 (2020)

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