"Control Strategy for a Low Cost Manipulator to Transport and Align IC ..."

Jianhua Wang et al. (2009)

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DOI: 10.1109/TCST.2008.2004788

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type: Journal Article

metadata version: 2020-06-08

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Jianhua Wang, De Xu, Min Tan, Yun Liu:
Control Strategy for a Low Cost Manipulator to Transport and Align IC Mask-Plates. IEEE Trans. Control. Syst. Technol. 17(5): 1018-1027 (2009)

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