"Wafer Residency Time Analysis for Time-Constrained Single-Robot-Arm ..."

Fajun Yang et al. (2020)

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DOI: 10.1109/TCST.2019.2902329

access: closed

type: Journal Article

metadata version: 2025-01-19

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Fajun Yang, Xin Tang, Naiqi Wu, Chunjiang Zhang, Liang Gao:
Wafer Residency Time Analysis for Time-Constrained Single-Robot-Arm Cluster Tools With Activity Time Variation. IEEE Trans. Control. Syst. Technol. 28(4): 1177-1188 (2020)

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