"AFM Tip Localization and Efficient Scanning Method for MEMS Inspection."

Huang-Chih Chen et al. (2022)

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DOI: 10.1109/TIM.2022.3175250

access: closed

type: Journal Article

metadata version: 2022-06-02

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Huang-Chih Chen, Yi-Lin Liu, Ching-Chi Huang, Li-Chen Fu:
AFM Tip Localization and Efficient Scanning Method for MEMS Inspection. IEEE Trans. Instrum. Meas. 71: 1-12 (2022)

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