"Consideration of the fringe effects of capacitors in micro accelerometer ..."

Wu Zhou et al. (2018)

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DOI: 10.1177/0142331217711245

access: closed

type: Journal Article

metadata version: 2023-04-19

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  - https://dblp.org/rec/journals/tinstmc/0003LYLPH18
Wu Zhou, Hongfang Lan, Huijun Yu, Liushan Lai, Bei Peng, Xiaoping He:
Consideration of the fringe effects of capacitors in micro accelerometer design. Trans. Inst. Meas. Control 40(9): 2881-2886 (2018)

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