"Extracting Behavioral Data from Physical Descriptions of MEMS for Simulation."

Dennis Gibson, Carla N. Purdy (1999)

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DOI: 10.1023/A:1008151424166

access: closed

type: Journal Article

metadata version: 2020-05-20

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Dennis Gibson, Carla N. Purdy:
Extracting Behavioral Data from Physical Descriptions of MEMS for Simulation. J. VLSI Signal Process. 22(2): 135-146 (1999)

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