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"Processing active devices on Si interposer and impact on cost."
Dimitrios Velenis et al. (2015)
- Dimitrios Velenis, Mikael Detalle, Geert Hellings, Mirko Scholz, Erik Jan Marinissen
, Geert Van der Plas
, Antonio La Manna, Andy Miller, Dimitri Linten, Eric Beyne
:
Processing active devices on Si interposer and impact on cost. 3DIC 2015: TS11.2.1-TS11.2.4
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