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"Robust Synchronization of Motion in Wafer Scanners Using Particle Swarm ..."

Vincent A. Looijen, Marcel François Heertjes (2018)

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DOI: 10.1109/CCTA.2018.8511380

access: closed

type: Conference or Workshop Paper

metadata version: 2019-01-01

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Vincent A. Looijen, Marcel François Heertjes:
Robust Synchronization of Motion in Wafer Scanners Using Particle Swarm Optimization. CCTA 2018: 1102-1107

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