"From planar to vertical capacitors: A step towards ferroelectric V-FeFET ..."

Karine Florent et al. (2017)

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DOI: 10.1109/ESSDERC.2017.8066617

access: closed

type: Conference or Workshop Paper

metadata version: 2024-06-09

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Karine Florent, Simone Lavizzari, Luca Di Piazza, Mihaela Ioana Popovici, Goedele Potoms, Tom Raymaekers, Guido Groeseneken, Jan Van Houdt:
From planar to vertical capacitors: A step towards ferroelectric V-FeFET integration. ESSDERC 2017: 164-167

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