"WISDOM: Wire spreading enhanced decomposition of masks in Double ..."

Kun Yuan, David Z. Pan (2010)

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DOI: 10.1109/ICCAD.2010.5654070

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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Kun Yuan, David Z. Pan:
WISDOM: Wire spreading enhanced decomposition of masks in Double Patterning Lithography. ICCAD 2010: 32-38

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