"Pure-Metal Replacement Gate for Reliable 30 nm Pitch Scaled 3D NAND Flash."

S. Rachidi et al. (2024)

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DOI: 10.1109/IMW59701.2024.10536954

access: closed

type: Conference or Workshop Paper

metadata version: 2024-06-10

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S. Rachidi, S. Ramesh, Davide Tierno, G. L. Donadio, A. Pacco, J. W. Maes, Y. Jeong, Antonio Arreghini, Geert Van den Bosch, Maarten Rosmeulen:
Pure-Metal Replacement Gate for Reliable 30 nm Pitch Scaled 3D NAND Flash. IMW 2024: 1-4

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