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"A TDC-based nano-scale displacement measure method inside scanning ..."

Chao Zhou et al. (2016)

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DOI: 10.1109/ROBIO.2016.7866505

access: closed

type: Conference or Workshop Paper

metadata version: 2020-08-27

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  dblp key:
  - conf/robio/ZhouWDWCWT16
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Chao Zhou, Yu Wang, Lu Deng, Zhengxing Wu, Zhiqiang Cao, Shuo Wang, Min Tan:
A TDC-based nano-scale displacement measure method inside scanning electron microscopes. ROBIO 2016: 1298-1302

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